Version 1.03 - 12/22/23
- Units of subdicing graphics corrected to be mm. This is a purely graphical change and does not indicate a change to the process itself.
Version 1.02 - 9/26/23
- Process graphics updated to show the pad oxide layer enclosing via holes. This is a purely graphical change and does not indicate a change to the process itself.
Version 1.01 - 5/31/23
- "Designed-in subdicing" added to Piezo MEMS process to parallel the SOI MEMS options.
- FAQ now properly lists aluminum as the pad metal material. This is a purely textual change and does not indicate a change to the process itself.
Version 1.0 - 3/10/23
- Initial document release.