Version 1.03 - 12/22/23

• Units of subdicing graphics corrected to be mm. This is a purely graphical change and does not indicate a change to the process itself.

Version 1.02 - 9/26/23

• Process graphics updated to show the pad oxide layer enclosing via holes. This is a purely graphical change and does not indicate a change to the process itself.

Version 1.01 - 5/31/23

• "Designed-in subdicing" added to Piezo MEMS process to parallel the SOI MEMS options.
• FAQ now properly lists aluminum as the pad metal material. This is a purely textual change and does not indicate a change to the process itself.

Version 1.0 - 3/10/23

• Initial document release.