A gravel path wends between low brush and hills of pastel grasses.A gravel path wends between low brush and hills of pastel grasses.

Science Foundry

Build on Science’s advanced MEMS capabilities for your own research or product development

Science Foundry is your fastest path from design to device

Iterate in weeks, not months, with no upfront investment required.

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Graphic showing a transition between the conceptual, line art of an electrode and the final, realized product.
Operators in bunny suits and goggles are seen working around microscopes.
Dedicated Wafers

Design with specialized wafer runs for complete control of the process or larger designs.

Multi-Project Wafers

Join a scheduled run to gain the fastest turnaround times and user friendly documentation support.

Custom Technologies

Build a custom run with our diverse capabilities to achieve a high level of control, even at low quantities.

Over 80 tools spanning broad capabilities

LPCVD films

Important films, deposited on both sides of the substrate, provide excellent conformal coating, high breakdown and dielectric isolation

Low stress nitride

Low temperature oxide

Low stress polysilicon

Phosphosilicate glass (PSG)

Clean room operator inspecting the inside of a machine.
A microscope with four objectives is prepared for use.

Post processing

Tools designed for soft contact can place sensitive devices on substrates or packages or subdivide a chip.

Dicing

Pick and place

Lithography

Process by which a light-sensitive polymer, called a photoresist, is exposed and developed to form 3D relief images on the substrate.

Maskless alignment

Front to back alignment

Polymer films

Polymeric films are defined as thin continuous materials typically up to 200 μm (0.008 in.) thick.

Polyimide

Parlyene-C

Dry etching

Removal of plastic or other semiconductor material using plasma as opposed to chemical treatment.

DRIE

Plasma clean

Efficient, software-enabled custom process development

Metallization

Metal Deposition. After devices have been fabricated in the silicon substrate, connections must be made to link the circuits together.

Evaporation

Sputtering

A stack of polished wafers are stashed vertically in organized dividers.

Wafer bonding

Attachment of two or more substrates or wafers to one another through a range of physical and chemical processes

Si fusion

Glass-glass

Continuous investment in new tools and processes

Metrology

The science of measurement, embracing both experimental and theoretical determinations at any level of uncertainty.

SEM / FIB

Profilometry

Wet etching

Material removal process that uses liquid chemicals or etchants to remove materials from a wafer

KOH silicon etch

Wet oxide etch

Stacks of finished product sit in neat packages.

Thermal processing

Temperature treatments for metal or silicon, customized to deliver specific material properties.

Silicon oxidation

Anneals

Two operators discuss technique outside the clean room.
Custom technologies backed by decades of experience and process documentation to make designing as simple as possible.
Scanning electron microscope photo of patterned vias in the dimpled surface of a thin film electrode.
Thin-Film Electrodes

Three masks, two polyimide layers, and two metal layers create an ideal set up for fast and easy electrode designs.

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Scanning electron microscope photo of a linear stepper motor.
Poly

Eight masks, three polysilicon layers, and one metal layer can be modified for the highest degree of customization.

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Scanning electron microscope photo of three cantilevers, one patterned with piezoelectrics.
Piezo

Five masks, a SOI wafer, and distinct metal and piezoelectric layers offer an efficient ecosystem for piezo designs.

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Scanning electron microscope photo of a reflecting square applied over an actuated platform.
SOI

Four masks, a SOI wafer, and two metal layers provide a structured approach to silicon designs.

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Scanning electron microscope photo of two rotating components over a trench.
Custom Processes

Design with near limitless potential by synthesizing several of our capabilities towards your design needs.

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The fastest path from design to
  • biosensing
  • quantum computing
  • aerospace
  • telecommunications
  • neural engineering

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Graphic showing a transition between the conceptual, line art of an electrode and the final, realized product.